CPL190/290 Capacitive Sensor Module

Description

Precise, High-Speed Measurements

• High Resolution
  • 0.003% @ 15 kHz typical (as low as 0.25 nanometers)
  • 0.0005% @ 100 Hz typical (as low as 0.05 nanometers)
  • Probe/Range dependent, see Probes and Ranges below for specifics
• User selectable bandwidth filters (100 Hz, 1 kHz, 10 kHz, unfiltered)
• Linearity: 0.2%, Typical
• 15 kHz Bandwidth
• Small phase shift – excellent for servo applications

Convenient Output Interface and Range Selections

• Measurement Ranges Available: 10 µm to 12.5 mm
• Switchable Dual-Range/Sensitivity (CPL290 only)
• ±10 V Output
• Easy National Instruments DAQ Connection via 68-Pin connector

Versatile, Useful Features

• Visual Range Indicator
• Coarse/Fine Adjustable Zero
• Zero Adjust Disable
• Single or Multiple Channel enclosures
• Front Panel Ground Connection
• Standard Probes can be ordered as vacuum compatible.

Life-Cycle Status: Active

Specifications

Typical specifications. Resolution and linearity depend on probe, range, and bandwidth. See Probes and Ranges for details.

Typical Resolution*	0.003% @ 15 kHz 0.0005% @ 100 Hz
Bandwidth (PCB Dip-Switch Selectable)	15 kHz, 10 kHz, 1 kHz, 100 Hz
Typical Linearity*	0.2%F.S.
Maximum Drift	0.04%F.S./°C
BNC Output	±10 V, 0 ohms, 15 mA max
Rear Panel National Instruments Interface Connector Output Voltage	Differential ±10 V
Operating Temperature	4-50 °C

*Probe/Range dependent, see Range/Resolution table belo

CPL190/CPL290 Measurement Ranges/Resolutions – Probe Dependent

Listed specifications assume a 2 meter probe cable; flat measurement area diameter at least 1.3 times larger than the Sensing Area diameter; and no customizations.

1 mil = 0.001″

				Integral filters included in the CPL190 and CPL290
Standard Probes Sensing Area Diameter mm	Measurement Range			Resolution* @ Bandwidth				Linearity % F.S.	Body Style
	Range Type	Range µm mils	Near Gap µm mils	100 Hz nm µin	1 kHz nm µin	10 kHz nm µin	15 kHz nm µin
0.5	Fine	10 0.4	20 0.8	0.06 0.003	0.1 0.004	0.4 0.016	0.5 0.020	0.25
	Standard	50 2.0	50 2.0	0.3 0.012	0.5 0.020	3.0 0.12	4.0 0.16	0.25
	Extended	80 3.0	60 2.4	0.5 0.02	1.0 0.04	5.0 0.20	—	0.25
0.8	Fine	25 1.0	75 3.0	0.2 0.008	0.5 0.02	1.2 0.05	1.5 0.06	0.15
	Standard	100 4.0	100 4.0	0.5 0.02	1.0 0.04	3.5 0.14	5.0 0.20	0.15
2.0	Ultrafine	10 0.4	20 0.8	0.05 0.002	0.08 0.003	0.15 0.006	0.25 0.010	0.15
	Fine	50 2.0	75 3.0	0.20 0.008	0.30 0.010	0.60 0.024	1.0 0.040	0.15
	Standard	250 10.0	125 5.0	0.80 0.03	1.0 0.04	4.0 0.16	5.0 0.20	0.10
	Extended	500 20.0	125 5.0	1.5 0.06	3.0 0.12	8 0.32	10 0.40	0.15
3.2	Fine	50 2.0	125 5.0	0.25 0.010	0.40 0.016	1.0 0.032	1.6 0.052	0.20
	Standard	500 20.0	250 10.0	2.0 0.10	3.0 0.12	6.0 0.28	10 0.40	0.15
	Extended	1250 50.0	250 10.0	10 0.28	15 0.40	20 0.80	30 1.2	0.20
5.6	Fine	50 2.0	225 9.0	0.30 0.012	0.40 0.016	0.80 0.040	1.3 0.060	0.20
	Standard	500 20.0	500 20.0	2.5 0.08	3.0 0.12	7.0 0.24	10 0.40	0.15
	Extended	2000 80.0	250 10.0	7 0.40	10 0.60	20 0.80	30 1.2	0.20
13	Fine	2000 80.0	2000 80	20 0.80	30 1.2	35 1.4	40 1.6	0.5
	Standard	3200 125	2000 80	30 1.2	40 1.6	50 2.0	60 2.4	0.5
	Extended	5000 200	3000 120	75 3.0	100 4.0	130 5.2	150 6.0	0.5
19	Standard	2500 100.0	5000 200	50 2.0	70 2.8	90 3.6	100 4.0	0.3
	Extended	6000 250.0	3000 120	90 3.6	120 4.8	160 6.4	180 7.2	1.0
21	Standard	8000 300	5000 200	75 3.0	100 4.0	130 5.2	150 6.0	0.5
	Extended	12500 500	5000 200	130 5.2	180 7.2	230 9.2	250 10	0.5

* Resolution values are RMS. Peak-to-peak values are typically 8-10 times greater than the RMS values. Read Understanding Sensor Resolution Specifications and Effects on Performance about this often misunderstood specification.
In high EMI conditions (10 V/m), output DC level may shift and noise may rise to 0.2 VRMS (1% resolution)
Custom calibrations can achieve exceptional resolution performance